The Agilis™ Piezo Motor linear stages are high precision miniature stages featuring Newport’s proprietary Agilis piezo motor. With ultra-high adjustment sensitivity, convenient programmable operation, and compact design, Agilis stages provide outstanding motion performance at the cost of a high quality manual stage.
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AG-LS25 Piezo Linear Stage, 12 mm travel |
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$887 |
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AG-LS25-27 Piezo Linear Stage, 27 mm travel |
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$1,251 |
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AG-LS25V6 Piezo Linear Stage, 12 mm travel, Vacuum Compatible |
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$1,315 |
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AG-LS25-27V6 Piezo Linear Stage, 27 mm travel, Vacuum Compatible |
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$1,744 |
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| Models |
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AG-LS25V6 |
AG-LS25-27 |
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|---|---|---|---|---|---|
| Travel Range | 12 mm | 12 mm | 27 mm | 27 mm | |
| Minimum Incremental Motion | 50 nm | 50 nm | 100 nm | 100 nm | |
| Maximum Speed | 0.5 mm/s | 0.5 mm/s | 0.5 mm/s | 0.5 mm/s | |
| Centered Load Capacity | 3 N | 3 N | 2.5 N | 2.5 N | |
| Vertical Load Capacity | 2 N | 2 N | 1.5 N | 1.5 N | |
| Holding Force | 4 N | 4 N | 4 N | 4 N | |
| Vacuum Compatibility | 10-6 Torr | 10-6 Torr | |||
| Pitch | ±100 µrad | ±100 µrad | ±100 µrad | ±100 µrad | |
| Yaw | ±100 µrad | ±100 µrad | ±100 µrad | ±100 µrad | |
| Material | Stainless Steel | Stainless Steel | Stainless Steel | Stainless Steel | |
| Cable Length | 1.2 m | 1.2 m | 1.2 m | 1.2 m | |
| Operating Temperature | 10 to 35°C | 10 to 35°C | 10 to 35°C | 10 to 35°C | |
| Weight | 70 g | 70 g | 125 g | 125 g |
Agilis™ piezo motor linear stages can be configured as XY, XZ, or XYZ stage stacks. You can use the
Newport also offers a version of the 27-mm travel Agilis linear stage with a built-in direct read linear encoder and integrated CONEX controller, the
The Agilis proprietary piezo technology provides 50 nm incremental motion capability, making them ideal for ultra-sensitive alignments and adjustments.
The Agilis linear stages are available in vacuum compatible versions which can be used in vacuum (10-6 Torr) environments.
The Agilis piezo motor is directly coupled to the moving carriage with no intermediate screw or gear, avoiding problems with coupling in drivetrain. When idle, the holding force of the motor locks the position for true set-and-forget long-term stability.
The thermally matched stainless steel design and precision manufactured bearing surfaces of the Agilis linear stage provide ripple-free, low friction linear travel and angular deviations better than 100 µrad in any axis.
Ultra-High Velocity