Our vacuum compatible piezo stack actuators are equipped with a highly reliable, multi-layer, low-voltage, piezoelectric transducer stack. They are internally pre-loaded by a mechanical spring and feature high resonant frequencies, making them ideal for high load, dynamic vacuum applications.
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vacuum-piezo-stack-actuators - Drawings
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Features
Sub-Nanometer Positioning Resolution
With positioning resolution as low as 0.05 nm, the NPA Piezo Stack Actuators make ultra-fine adjustments with resolution only limited by the noise of the control electronics.
Ultra-High Load Capacity
NPA Piezo Stack Actuators can generate large forces up to 1000 N which make them particularly useful for machine tools, active vibration isolation, or adaptive mechanics.
Optional Strain-Gauge for Closed-Loop Operation
Closed-loop versions feature high resolution strain-gauge position sensors for highly accurate and repeatable motion which also compensates for actuator creep. The assembly is done as a full Wheatstone bridge and is temperature insensitive. The closed-loop devices can be used in either open or closed-loop control.
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