The 253B-1-40-1 Exhaust Throttle Valve regulates the removal of gas from a processing system. It features a 1.270 inch (32 mm) nominal inside diameter and a size NW40 ISO-KF Flange. A flapper O-ring is included. Its flapper is positioned to modulate gas flow, thereby controlling process pressure. The 253 has a patented non-linear actuator placed between the flapper shaft and the motor drive shaft in order to generate a linear valve transfer characteristic and provide smooth linear pressure control. The Type 253 is available in standard sizes and flange styles, and is compatible with all MKS throttle valve controllers.
Mechanical (non belt) drive with integral cosine generator
Valve Speed
7.5 s
Resolution
1/10,000
Flapper O-ring
Yes
Helium Leak Rate
1 x 10-8 scc/sec
Closed Leakage
<10-7 (Torr l/s)
Operating Temperature Range
Valve Body: 0 - 90°C Valve Motor: 0 - 70°C
Maximum Differential Pressure Across Valve
1 Atmosphere
Type
Exhaust Throttle Valve
Flange Type
ISO-KF
Flange Size
NW40
Inner Diameter
1.270 in. (32 mm)
Valve Drive
Mechanical (non belt) drive with integral cosine generator
Valve Speed
7.5 s
Resolution
1/10,000
Flapper O-ring
Yes
Helium Leak Rate
1 x 10-8 scc/sec
Closed Leakage
<10-7 (Torr l/s)
Operating Temperature Range
Valve Body: 0 - 90°C Valve Motor: 0 - 70°C
Maximum Differential Pressure Across Valve
1 Atmosphere
253B-1-40-1 - Drawings & CAD
Additional CAD file downloads are not available for this product.
253B-1-40-1 - Drawings
Additional drawings are not available for this product.
253B-1-40-1
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Exhaust Throttle Valve, 1.27 in. ID, NW40 ISO-KF, Flapper O-ring