8081M-UHV Motorized XYZθxθy Tilt Aligner

Motorized XYZθxθy Tilt Aligner, Ultra High Vacuum, M6

Model: 8081M-UHV

$8,740

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Product Series Overview

Vacuum Piezo Device Alignment Stages

The 8081M-UHV XYZTxTy Motorized Five-Axis Tilt Aligner which increases the utility of our popular kinematic stages by motorizing each of the axes can now be used in UHV environments (10^-9 Torr) as well as for VUV/EUV applications. The Picomotor™ actuators to each stage allows the same better than <30 nm remote high-resolution adjustment of various combinations of X, Y, Z, Tx, and Ty. With its minimal backlash, it is excellent for long term stability and high stiffness. The 8081-UHV has been tested and measured to outgas levels less than 5ppm of volatile mass at 85 °C over three hours. Mass Spectrograms detailing the exact outgassing compounds are available upon request. M4 and M6 tapped holes. Use with one 8081-UHV-C cable, two 8725 multi axis adapters and two 8742 controller/drivers to control all 5 axes.

Specifications

Technical Specs

Axes of Travel

X, Y, Z, θx, θy
Mechanism

Kinematic
Drive Type

Picomotor
Travel Range

3 mm
Angular Range

θx=8°, θy=10°
Load Capacity

13 N
Minimum Incremental Motion

<30 nm

Angular Resolution

θ_x, θ_y≤0.7 µrad
Vacuum Compatibility

10^-9 Torr
Wire Type

Kapton® Ribbon Ultrahigh Vacuum Rated
Connector Type

DB15 Female
Operating Temperature

10 to 40°C
Thread Type

M4 and M6

Axes of Travel

X, Y, Z, θx, θy
Mechanism

Kinematic
Drive Type

Picomotor
Travel Range

3 mm
Angular Range

θx=8°, θy=10°
Load Capacity

13 N
Minimum Incremental Motion

<30 nm

Angular Resolution

θ_x, θ_y≤0.7 µrad
Vacuum Compatibility

10^-9 Torr
Wire Type

Kapton® Ribbon Ultrahigh Vacuum Rated
Connector Type

DB15 Female
Operating Temperature

10 to 40°C
Thread Type

M4 and M6

Resources & Downloads

Literature

8081(M)-UHV Datasheet (902.4 kB, PDF)
UHV Picomotors (1.6 MB, PDF)
8081 UHV connection illustration (340.3 kB, PDF)

2D / 3D CAD Software

Download CAD Files

Drawings And Cad

8081(M)-UHV_RC (100.2 kB, PDF)

Manuals

8081-UHV Kinematic Stage Quickstart Guide (445.7 kB, PDF)

Application Notes

Piezo Motor Laser Application Note (984.9 kB, PDF)

Related Products

Compatible

Description	Compatibility	Avail.	Price
8742-4-KIT Picomotor Controller Kit, Four-Axis	UNIVERSAL	Show	$1,395
8081-UHV-C Cable, 8081-UHV, 1.83 m, DB15 Female to 6-pin RJ25 Connector	UNIVERSAL	Show	$92
8725 Multi-Axis Adapter, Picomotor, 6 pin to 3x 4 pin	UNIVERSAL	Show	$119

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