The M-VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.
Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any direction.
The lifting approach of the VP-5ZA allows centering of the payload over the bearings and close to the position feedback. This avoids any cantilevered loads that cause angular deformations and results in more precise motion with a higher load capacity.
Using a unique arrangement of two wedges which move past each other via inclined, recirculating ball bearings and 2 pairs of vertically mounted double-row linear ball bearing slides result in pure vertical motion.
A pattern of threaded holes on the top plate provides compatibility with the VP-25X linear stages and other Newport positioning products. A standard 3-point mounting interface for a wafer chuck is provided as well. For mounting the VP-5ZA to optical tables or to the ILS linear stages, use the optional base plate VP-BP. Manual vertical adjustments can be conveniently made using a flat screw driver.
An efficient, high torque DC motor with a precision preloaded, long-life, ball screw ensures high speed motion with minimum settling time. A high-resolution linear scale is directly attached to the moving rail, eliminating all drive-train induced motion errors. In addition, the space-saving, fixed read head design avoids any moving cables. The result is a robust and long lasting stage with an MTBF of 20,000 hours.
Ultra-High Velocity Learn More
