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The DynamYX® GT air-bearing stage is intended for high-throughput applications with aggressive duty-cycles. Featuring an extremely rigid structure and high load capacity air bearings, it provides up to 2G acceleration. The DynamYX GT also has high-efficiency X and Y linear motors with integrated cooling drive moving masses through the respective CG's. It is also available with Newport’s patented ZT3, Z-Tip-Tilt-Theta stage
| Compare | Description | Compatibility | Drawings, CAD & Specs | Avail. | Price | |||
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DYNAMYX300 Air Bearing Stage, Wafer Positioning, DynamYX® 300 | UNIVERSAL |
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DYNAMYX-RS Air Bearing Stage, Reticle Positioning, DynamYX® RS | UNIVERSAL |
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HybrYX Hybrid Air Bearing Stage, Single Plane XY | UNIVERSAL |
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DYNAMYX-DATUM Air Bearing Stage, Ultra-High Performance, DynamYX® Datum® | UNIVERSAL |
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DYNAMYX-GT Air Bearing Stage, High-Throughput, DynamYX® GT | UNIVERSAL |
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HybrYX-G5 Hybrid Air Bearing Stage, Single Plane XY, Large Payloads | UNIVERSAL |
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